Tystar
Product Line
- TYTAN Horizontal Furnace Atmospheric & LPCVD
- Photochemical CVD Reactor PVD 1000
- Fiberoptic Preform CVD Reactor
- Photomask & Wafer Cleaning System
- Mass Flow Calibrator CALSTAR 400
- Electronic Process Controllers
- Special CVD Equipment
- Retrofits, Repairs & Service
The TYTAN Furnace System provides these important benefits:
- A small footprint saves up to 40% of cleanroom space
- Superior process uniformity
- Outstanding throughput due to 95%+ up-time
- Processing of wafers up to 12"/300mm
- Energy savings of up to 50% over competing products
TYTAN furnaces are available in several sizes and configuration.