MEC Tech, Inc.

MEC Tech, Inc. specializes in spare parts for semiconductor processing equipment.

DPS Chamber Refurb: Machine Type: AMAT Poly or Metal DPS
Product Material: Anodised Aluminium
OEM Part Number: 0020-33806
FasTrack System: Machine Type: AMAT 8330 Six-inch tool
Benefits: Significantly reduces downtime when changing consumables by eliminating the removal of the pedestals.
ULTRA QUARTZ GDP: Machine Type: MXP+ and Super E
Wafer Size: 8"
OEM Description: Gas distribution plate
Product Material: quartz
Feature: Full radiuses on both sides of GDP
Benefit: Ultra-Low to no particle shedding
Refurbishment rrogram available
OEM Part Number: 0020-00410, 0200-10246